Efem

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efem

Acronym Finder: EFEM stands for Equipment Front End Module Suggest new definition. This definition appears very rarely and is found in the following Acronym Finder categories:
Equipment Front End Module (EFEM) is the mainstay of semiconductor automation, shuffling product (silicon wafers or quartz photo-masks) between ultra-clean storage carriers and a
Acronym Definition; EFEM: Equipment Front End Module
2 station 50mm thru 300mm open or SMIF equipment front end ; 50000hr robot MTBF / 150,000hr loadport MTBF ; dual arm buffering for ultra quick swap times
Asyst technologies, Inc. provides automation solutions optimized for the needs of global customers in the semiconductor, flat panel display, and related industries.
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Asyst's Spartan EFEM is truly a next generation high throughput 300mm front-end automation solution. Designed from the outset as a unified atmospheric wafer handling
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